如果定值是50毫秒,交換數據每50毫秒更新并發(fā)送-次。如果定值是1000毫秒，交換數據將每秒更新及發(fā)送一次。EGD交換1的定值范圍是50到1000毫秒。交換2和3的定值范圍是500到1000毫秒。交換1數屠項1至20/50這些定值指定EGD交換-部分數據項。幾乎任意C60記憶圖中的數據均可以配置為包含在一個EGD交換中。

PVD Wide Body Chamber Endura PVD 0240-75129

APPLIED MATERIALS P/N 0010-12815 200MM ENDURA HEATER

DAIHEN AGA-50B2-V / DGP-120A2 TYPICAL 600012553 RF GENE

YASKAWA ELECTRIC TEL TOKYO ELECTRON ES1D80-002075-1?2R C

Advantest T5771ES-Flash Memory Tester

CDE RESMAP 463 4PP FOUR POINT PROBE

APPLIED MATERIALS 0010-03347M Heater, assy 6” SHT .025

Advantest-H7-07?61X01 Tester Head

Asyst LPT 2200

Rorze RR713L1521-3A3-?E11-0 Dual Arm Robot with controll

Alatel 2300 Turbo Pump

ADVANCED ENERGY 3152343-101B MDX-L HALO

Brooks Automation SEZ SP/PRI ATM-407B-2-S-CE ROBOT 200M

NGK AMAT 0190-03516 HEATER ASSY NGK HA-12 COMMON REV 2

Brooks Robot 002-0000-06 DualArm 002-001516 PWR SPLY 00

232 SEIKO SEIKI STP- H803C1 TURBO PUMP

ADVANCED ENERGY DPS SOURCE MATCH 3150595-000

Porter Controller Novellus Concept 1 System Model 27017

Adixen Turbopump ATH 1600 Vat mount 3620-00192 6504-P

PowerVar Line Conditioner LITARSO5

Noah Precision 3300 Chiller